منابع مشابه
Active sensing in silicon-based MEMS resonators
Microelectromechanical resonators are advantageous over traditional LC tanks and off-chip quartz crystals due to their high quality factors, small size and low power consumption. FET-sensing has been demonstrated in resonant body transistors (RBTs) to reach an order of magnitude higher frequencies than possible with passive resonators due to the greater sensing efficiency of FET sensing over tr...
متن کاملthe impact of portfolio assessment on iranian efl students essay writing: a process-oriented approach
this study was conducted to investigate the impact of portfolio assessment as a process-oriented assessment mechanism on iranian efl students’ english writing and its subskills of focus, elaboration, organization, conventions, and vocabulary. out of ninety juniors majoring in english literature and translation at the university of isfahan, sixty one of them who were at the same level of writing...
15 صفحه اولThermally Actuated Low Impedance MEMS Resonators for Mass Sensing Applications
This paper presents high-Q thermally actuated micromechanical resonators suitable for sensory applications under atmospheric pressure. Single crystal silicon resonators with resonance frequencies in the 250 KHz to 1.5MHz range were fabricated using a single-mask fabrication process on SOI substrates. The resonators were operated in a one-port configuration in their in-plane resonance mode with ...
متن کاملFully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators
The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26 MHz bandpass filter with a very low bandpass distortion (less than 0.1 dB), which makes the filter suitable for wireless super-hetherodyne transceivers in commun...
متن کاملNanotubes and Nanorods on CMOS Substrates for Gas Sensing
In this paper we discuss the combined use of integrated CMOS microhotplates employing nanomaterial sensing layers for intelligent, compact gas sensors with increased sensitivity, selecitivity and fast response times. We first review the status of nanomaterial-based gas sensors, their operating principles, discussing growth issues and their compatbility with CMOS substrates. We then describe Mul...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2020
ISSN: 1424-8220
DOI: 10.3390/s20174663